Vacuum-ultraviolet ellipsometry spectra and structural properties of Pb(Zr,Ti)O3 films

Thin Solid Films

Volumn 519, Issue 9, 2011, Pages 2885-2888

  Suchaneck, G ^a   Chvostova D ^b   Kousal, J ^c   Zelezny V ^b   Lynnyk, A ^b   Jastrabik L ^b   Gerlach, G ^a   Dejneka, A ^b  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Film structure; Optical properties; PZT film; Vacuum ultraviolet ellipsometry

Indexed keywords

ABSORPTION MAXIMA; BAND GAP ENERGY; BAND-GAP REGION; CHEMICAL SOLUTIONS; DIELECTRIC FUNCTIONS; EFFECTIVE MEDIUM APPROXIMATION; FILM STRUCTURE; INTER-ATOMIC DISTANCES; INTER-BAND TRANSITION; PB(ZR , TI)O; PZT; PZT FILM; SPECTRAL RANGE; SPECTRAL REGION; VACUUM ULTRAVIOLETS; VACUUM-ULTRAVIOLET ELLIPSOMETRY;

CHEMICALS; ELLIPSOMETRY; LATTICE CONSTANTS; LEAD; OPTICAL PROPERTIES; PEROVSKITE; SEMICONDUCTOR QUANTUM WELLS; ULTRAVIOLET SPECTROSCOPY; VACUUM; VOID FRACTION; ZIRCONIUM;

OPTICAL FILMS;

EID: 79952623653     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.11.076     Document Type: Article

References (26)

1. C.H. Peng, J.F. Chang, and S.B. Desu A.I. Kingon, E.R. Myers, B. Tuttle, Ferroelectric Thin Films II MRS Symp. Proc. vol. 243 1992 21 26 Warrendale, PA
2. G. Suchaneck, and G. Gerlach Phys. Status Solidi A 185 2001 115
3. M.P. Moret, M.A.C. Devillers, K. Wörhoff, and P.K. Larsen J. Appl. Phys. 92 2002 468
4. Shenohong Yang, Dang Mo, and Xinggui Tang Ferroelectrics 287 2003 35
5. A. Mamedov Ferroelectrics 303 2004 141
6. H. Lee J. Appl. Phys. 98 2005 094108
7. D. Chvostova, L. Pajasova, and V. Zelezny Phys. Status Solidi C 5 2008 1362
8. J. Robertson, W.L. Warren, and B.A. Tuttle J. Appl. Phys. 77 1995 3975
9. V.I. Zametin Phys. Status Solidi B 124 1984 625
10. J. Tauc Mater. Res. Bull. 3 1968 37
11. G. Kresse, and J. Furthmüller Phys. Rev. B 54 1996 11169
12. R.D. King-Smith, and David Vanderbilt Phys. Rev. B 49 1994 5828
13. S.H. Wemple Phys. Rev. B 2 1970 2679
14. A. Deineka, L. Jastrabik, G. Suchaneck, and G. Gerlach Jpn. J. Appl. Phys. 41 2002 6966
15. G. Suchaneck, Wen-Mei Lin, G. Gerlach, A. Deyneka, and L. Jastrabik Integr. Ferroelectr. 80 2006 189
16. T.S. Moss Optical properties of semiconductors 1961 Butterworths London
17. G.D. Cody, T. Tiedje, B. Abeles, B. Brooks, and Y. Goldstein Phys. Rev. Lett. 47 1981 1480
18. P. Muralt, S. Hiboux, C. Mueller, T. Maeder, L. Sagalowicz, T. Egami, and N. Setter Integr. Ferroelectr. 36 2001 53
19. G. Suchaneck, A. Deyneka, L. Jastrabik, M. Savinov, and G. Gerlach Ferroelectrics 318 2005 3
20. V.S. Vidyarthi, W.-M. Lin, G. Suchaneck, G. Gerlach, C. Thiele, and V. Hoffmann Thin Solid Films 515 2007 3547
21. T. Kobayashi, J. Tsaur, M. Ichiki, and R. Maeda Chiao Jung-Chih, A.J. Hariz, D.N. Jamieson, G. Parish, V.K. Varadan, Device and Process Technologies for MEMS, Microelectronics, and Photonics III Proc. SPIE vol. 5276 2004 SPIE Bellingham (WA) 524 531
22. Joint Committee on Power Diffraction Standards (JCPDS), Swarthmore, PA (now International Centre for Diffraction Data (ICCD)) 2001.
23. D.E. Aspnes Thin Solid Films 89 1982 249
24. Md. Mosaddeq-ur-Rahman Appl. Opt. 37 1998 691
25. A.H. Kahn, and A.J. Layendecker Phys. Rev. 135 1964 A1321
26. M. Cardona, and G. Harbeke Phys. Rev. 137 1965 A1467