Multi-target reactive sputter deposition of lead-enriched Pb(Zr,Ti)O 3 thin films

Integrated Ferroelectrics

Volumn 80, Issue 1, 2006, Pages 189-195

  Suchaneck, G ^a   Lin, Wen Mei ^a   Gerlach, G ^a   Deyneka, A ^b   Jastrabik, L ^b  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; COMPOSITION; CRYSTAL LATTICES; DEPOSITION; ELLIPSOMETRY; LIGHT POLARIZATION; OPTICAL PROPERTIES; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; THIN FILMS;

LOW SUBSTRATE TEMPERATURES; MULTI-TARGET REACTIVE SPUTTERING; TETRAVALENT LEAD; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

LEAD COMPOUNDS;

EID: 33745744365     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600657633     Document Type: Article

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