Rotating compensator sampling for spectroscopic imaging ellipsometry

Thin Solid Films

Volumn 519, Issue 9, 2011, Pages 2742-2745

  Meng, Y H ^a,b   Jin, G ^a  

^a INSTITUTE OF MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Ellipsometry; Imaging ellipsometry; Nanofilm pattern; Rotating compensator; Spectroscopic ellipsometry; Spectroscopic imaging ellipsometry

Indexed keywords

ELLIPSOMETRIC ANGLES; IMAGING ELLIPSOMETRY; LATERAL RESOLUTION; NANO FILMS; ROTATING COMPENSATOR; SI SUBSTRATES; SPECTROSCOPIC IMAGING; THIN FILM PATTERNS;

FILM THICKNESS; SILICON COMPOUNDS; SPECTROSCOPIC ELLIPSOMETRY;

ROTATION;

EID: 79952619889     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.12.131     Document Type: Article

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