Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates

Review of Scientific Instruments

Volumn 67, Issue 8, 1996, Pages 2930-2936

  Jin, Gang ^a   Jansson, Roger ^a   Arwin, Hans ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000681116     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147074     Document Type: Article

References (18)

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