High resolution imaging microellipsometry of soft surfaces at 3 μm lateral and 5 Å normal resolution

Applied Physics Letters

Volumn 72, Issue 23, 1998, Pages 2930-2932

  Albersdorfer A ^a   Elender, G ^a   Mathe, G ^a   Neumaier, K R ^a   Paduschek, P ^a   Sackmann, E ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001712178     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121497     Document Type: Article

References (13)

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