Plasma flow induced local variation of dispersion constants of ITO-films observed with spectroscopic imaging ellipsometry

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1137-1140

  Vaupel, M ^a   Vinnichenko, M ^b  

^a Nanofilm Technologie GmbH   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSION CONSTANTS; FILM MICROSTRUCTURES; FREE-ELECTRON DENSITY; INHOMOGENEOUS PLASMA; LOCAL VARIATIONS; MICROSCOPIC SCALE; SPATIAL DISTRIBUTION; SPECTROSCOPIC IMAGING;

ITO GLASS; OPTICAL PROPERTIES; PLASMA DEVICES; PLASMA FLOW; PLASMA JETS; PLASMAS; SIZE DISTRIBUTION; SPECTROSCOPIC ELLIPSOMETRY; STOICHIOMETRY;

OSCILLATING FLOW;

EID: 77951099626     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200777772     Document Type: Conference Paper

References (6)

1. B.G. Lewis and D.C. Paine, MRS Bull. 25, 22 (2000).
2. I. Petrov, P.B. Barna, L. Hultman, and J.E. Greene, J. Vac. Sci. Technol. A 21, 1 (2003).
3. W. Ensinger, Nucl. Instrum. Methods B 127/128, 796 (1997).
4. A. Rogozin, M. Vinnichenko, N. Shevchenko, A. Kolitsch, and W. Moeller, Thin Solid Films 496, 197 (2006).
5. A.I. Rogozin, M.V. Vinnichenko, A. Kolitsch, and W. Möller, J. Vac. Sci. Technol. A 22, 349 (2004).
6. R.M.A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light (North Holland, 1987).