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Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1050-1053

An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate

(5) Meng, Y H a,b Chen, Y Y c Qi, C a,b Liu, L a,b Jin, G a

a INSTITUTE OF MECHANICS (China)

b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES (China)

c INSTITUTE OF GEOLOGY AND GEOPHYSICS (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATIC IMAGING; ELLIPSOMETRIC PARAMETERS; HIGH-THROUGHPUT; LATERAL RESOLUTION; POTENTIAL APPLICATIONS; SOLID SUBSTRATES; SPATIAL PROPERTIES; SPECTROSCOPIC ELLIPSOMETERS; VISIBLE REGION;

SILICON COMPOUNDS; SPECTROSCOPIC ELLIPSOMETRY; THIN FILM DEVICES;

SUBSTRATES;

EID: 77951130040 PISSN: 18626351 EISSN: 16101642 Source Type: Journal
DOI: 10.1002/pssc.200777784 Document Type: Conference Paper

Times cited : (9)

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