Single mode solid state distributed feedback dye laser fabricated by gray scale electron beam lithography on a dye doped SU-8 resist

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2456-2460

  Balslev, S ^a   Rasmussen, T ^a   Shi, P ^a   Kristensen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; FIBER BRAGG GRATINGS; OPTICAL PUMPING; POLYMERS; RESONATORS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DOPING; SOLID STATE LASERS;

BRAGG GRATINGS; LAB-ON-CHIP (LOC) CIRCUITS; LASING THRESHOLD; WAVELENGTHS;

DYE LASERS;

EID: 27944473161     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/030     Document Type: Article

References (31)

1. Soffer B H and McFarland B B 1967 Appl. Phys. Lett. 10 266-7
2. Peterson O G and Snavely B B 1967 Appl. Phys. Lett. 12 238-40
3. Kogelnik H and Shank C 1971 Appl. Phys. Lett. 18 152-4
4. Singh S, Kanetkar V R, Sridhar G, Muthuswamy V and Raja K 2003 J. Lumin. 101 285-91
5. Balslev S and Kristensen A 2005 Opt. Express 13 344-51
6. Oki Y, Yoshiura T, Chisaki Y and Maeda M 2002 Appl. Opt. 41 5030-5
7. Hu C and Kim S 1976 Appl. Phys. Lett. 29 582-5
8. Li Y, Sasaki M and Hane K 2001 J. Micromech. Microeng. 11 234-8
9. Nilsson D, Balslev S, Gregersen M M and Kristensen A 2005 Appl. Opt. 44 4965-71
10. Nilsson D, Nielsen T and Kristensen A 2004 Microelectron. Eng. 73-74 372-6
11. Nilsson D, Nielsen T and Kristensen A 2004 Rev. Sci. Instrum. 75 4481-6
12. Lee K Y, LaBianca N, Zolgharnain S, Rishton S A, Gelorme J D, Shaw J M and Chang T H P 1995 J. Vac. Sci Technol. B 13 3012-6
13. Lorenz H, Despont M, Fahrni N, LaBianca N, Renaudy P and Vettiger P 1997 J. Micromech. Microeng. 7 121-4
14. Bohl B, Steger R, Zengerle R and Koltay P 2005 J. Micromech. Microeng. 15 1125-30
15. Balslev S, Bilenberg B, Geschke O, Jorgensen A M, Kristensen A, Kutter J P, Mogensen K B and Snakenborg D 2004 Proc. 17th IEEE Conf. on Micro Electro Mechanical Systems, MEMS 2004 (Maastricht, 25-29 January) pp 89-92
16. Aktary M, Jensen M O, Westra K L, Brett M J and Freeman M R 2003 J. Vac. Sci. Technol. B 21 L5-7
17. Pepin A, Studer V, Decanini D and Chen Y 2004 Microelectron. Eng. 73-74 233-7
18. Kudryashov V, Yuan X-C, Cheong W-C and Radhakrishnan K 2003 Microelectron. Eng. 67-68 306-11
19. Wong W H and Pun E Y B 2001 J. Vac. Sci. Technol. B 19 732-5
20. Shields E A, Williamson F and Leger J R 2003 J. Vac. Sci. Technol. B 21 1453-8
21. Lading L, Nielsen L B and Sevel T 2002 Proc. IEEE Sensors 2002 pp 229-32
22. Voss T, Scheel D and Shade W 2001 Appl. Phys. B 73 105-9
23. McCall S L and Platzman P M 1985 IEEE J. Quantum Electron. 21 1899-904
24. Shank C, Bjorkholm J and Kogelnik H 1971 Appl. Phys. Lett. 18 395-6
25. Maeda M, Oki Y and Imamura K 1997 IEEE J. Quantum Electron. 33 2146-9
26. Hunsperger R G 2002 Integrated Optics: Theory and Technology (Springer Series in Optical Sciences) 5th edn (Heidelberg: Springer)
27. Schafer F P 1973 Dye Lasers (Berlin: Springer)
28. SU-8 2002 from MicroChem Corp., Newton, MA, USA. www.microchem.co
29. Data supplied by MicroChem Corp. Newton, MA, USA. www.microchem.com
30. 1987 CRC Handbook of Chemistry and Physics 67th edn (Boca Raton, FL: CRC Press)
31. Giffin S M, McKinnie I T, Wadsworth W J, Woolhouse A D, Smith G J and Haskell T G 1999 Opt. Commun. 161 163-70