Zero offset drift suppression in SiC pressure sensors at 600°C

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 2269-2274

  Okojie, Robert S ^a   Lukco, Dorothy ^a   Blaha, Charles ^a   Nguyen, Vu ^b   Savrun, Ender ^b  

^a NASA GLENN RESEARCH CENTER   (United States)

^b Sienna Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT METALLIZATION; DRIFT VELOCITIES; METALLIZATIONS; MICROSTRUCTURAL CHANGES; OFFSET VOLTAGE; PIEZO-RESISTIVE; PRESSURE MONITORING; RELIABLE OPERATION; SEM; SHORT DURATIONS; TEMPORAL DRIFTS; ZERO OFFSETS; ZERO PRESSURE;

AUGER ELECTRON SPECTROSCOPY; DEEP OIL WELL DRILLING; METALLIZING; PETROLEUM INDUSTRY; PRESSURE SENSORS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE;

WELL DRILLING;

EID: 79951903131     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690714     Document Type: Conference Paper

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