Response of Piezoresistive MEMS Accelerometers and Pressure Transducers to High Gamma Dose

IEEE Transactions on Nuclear Science

Volumn 50, Issue 6 I, 2003, Pages 1852-1859

  Holbert, Keith E ^a   Nessel, James A ^a   McCready, Steven S ^b   Heger, A Sharif ^b   Harlow, Thomas H ^b  

^a Arizona State University   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Accelerometers; Gamma radiation; Microelectromechanical (MEMS); Piezoresistive; Pressure transducers

Indexed keywords

ACCELEROMETERS; DOPING (ADDITIVES); ELECTRIC CURRENTS; ELECTRIC INSULATORS; ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; ELECTRON TUNNELING; GAMMA RAYS; INTERFACES (MATERIALS); MICROMACHINING; PRESSURE TRANSDUCERS; SENSORS; SILICON;

BULK SILICON DEVICES; CURRENT FLOW; PIEZORESISTIVE EFFECTS;

MICROELECTROMECHANICAL DEVICES;

EID: 1242287947     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2003.821373     Document Type: Conference Paper

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