메뉴 건너뛰기




Volumn 58, Issue 3, 1997, Pages 249-257

Electric drift of the bridge offset for pressure sensors and its utilization

Author keywords

Compensation of offset thermal drift; Electric drift; Electric non linearity; Pressure sensors

Indexed keywords

COMPOSITION EFFECTS; DOPING (ADDITIVES); ELECTRIC FIELD EFFECTS; ION IMPLANTATION; PIEZOELECTRIC MATERIALS; RESISTORS; THERMAL EFFECTS;

EID: 0031081870     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0924-4247(97)01399-x     Document Type: Article
Times cited : (17)

References (7)
  • 2
    • 0029252347 scopus 로고
    • Temperature compensated piezoresistor fabricated by high energy ion implantation
    • T. Nishimoto et al., Temperature compensated piezoresistor fabricated by high energy ion implantation, IEICE Trans. Electron Devices, E78-C (1995) 152-156.
    • (1995) IEICE Trans. Electron Devices , vol.E78-C , pp. 152-156
    • Nishimoto, T.1
  • 3
    • 0000023102 scopus 로고
    • Piezoresistive properties of silicon diffused layers
    • O.N. Tufte and E.L. Stelzer, Piezoresistive properties of silicon diffused layers, J. Appl. Phys., 34 (1963) 313-318.
    • (1963) J. Appl. Phys. , vol.34 , pp. 313-318
    • Tufte, O.N.1    Stelzer, E.L.2
  • 4
    • 0020781157 scopus 로고
    • Temperature sensitivity in silicon piezoresistive pressure transducers
    • S. Kim and K.D. Wise, Temperature sensitivity in silicon piezoresistive pressure transducers, IEEE Trans. Electron Devices, ED-30 (1983) 802-810.
    • (1983) IEEE Trans. Electron Devices , vol.ED-30 , pp. 802-810
    • Kim, S.1    Wise, K.D.2
  • 5
    • 0026881945 scopus 로고
    • Temperature compensation of piezo-resistive pressure sensors
    • M. Akbar and M. Shanblatt, Temperature compensation of piezo-resistive pressure sensors, Sensors and Actuators A, 33 (1992) 155-162.
    • (1992) Sensors and Actuators A , vol.33 , pp. 155-162
    • Akbar, M.1    Shanblatt, M.2
  • 6
    • 0019898237 scopus 로고
    • A simulation program for solid-state pressure sensors
    • K. Lee and K.D. Wise, A simulation program for solid-state pressure sensors, IEEE Trans. Electron Devices, ED-29 (1982) 34-41.
    • (1982) IEEE Trans. Electron Devices , vol.ED-29 , pp. 34-41
    • Lee, K.1    Wise, K.D.2
  • 7
    • 25044475341 scopus 로고
    • Measuring resistivity of silicon slices with a collinear four-probe array
    • Measuring resistivity of silicon slices with a collinear four-probe array, 1971 Annual Book of ASTM Standards (Part8), F84-70, 1971, pp.697-711.
    • (1971) 1971 Annual Book of ASTM Standards (Part8) , vol.F84-70 , pp. 697-711


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.