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Volumn 84, Issue 3, 2000, Pages 292-296

Characterization and modelling of the mismatch of TCRs and their effects on the drift of the offset voltage of piezoresistive pressure sensors

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; POTENTIOMETRIC SENSORS; RESISTORS; THERMAL EFFECTS; VOLTAGE MEASUREMENT;

EID: 0034276415     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00406-4     Document Type: Article
Times cited : (22)

References (18)
  • 1
    • 0024665367 scopus 로고
    • Capabilities and limits of silicon pressure sensors
    • Blasquez G., Pons P., Boukabache A. Capabilities and limits of silicon pressure sensors. Sens. Actuators. 17:1989;387-403.
    • (1989) Sens. Actuators , vol.17 , pp. 387-403
    • Blasquez, G.1    Pons, P.2    Boukabache, A.3
  • 2
    • 0008766227 scopus 로고
    • Temperature coefficient of resistivity of silicon and germanium near room temperature
    • Bullis W.M., Brewer F.H., Kolstad C.D., Swartzendruber L.J. Temperature coefficient of resistivity of silicon and germanium near room temperature. Solid-State Electron. 11:1968;639-646.
    • (1968) Solid-State Electron. , vol.11 , pp. 639-646
    • Bullis, W.M.1    Brewer, F.H.2    Kolstad, C.D.3    Swartzendruber, L.J.4
  • 4
    • 0026881945 scopus 로고
    • Temperature compensation of piezoresistive pressure sensors
    • Akbar M., Shanblatt M.A. Temperature compensation of piezoresistive pressure sensors. Sens. Actuators, A. 33:1992;155-162.
    • (1992) Sens. Actuators, a , vol.33 , pp. 155-162
    • Akbar, M.1    Shanblatt, M.A.2
  • 5
    • 0026820703 scopus 로고
    • Silicon pressure sensor with integrated bias stabilisation and temperature compensation
    • Crazzolara H., Von Munch W., Nagele M. Silicon pressure sensor with integrated bias stabilisation and temperature compensation. Sens. Actuators, A. 30:1992;241-247.
    • (1992) Sens. Actuators, a , vol.30 , pp. 241-247
    • Crazzolara, H.1    Von Munch, W.2    Nagele, M.3
  • 6
    • 0030244098 scopus 로고    scopus 로고
    • Surface micromachined piezoresistive pressure sensors with step-type bent and flat membrane structures
    • Lisec T., Kreutzer M., Wagner B. Surface micromachined piezoresistive pressure sensors with step-type bent and flat membrane structures. IEEE Trans. Educ. 43(9):1996;1547-1552.
    • (1996) IEEE Trans. Educ. , vol.43 , Issue.9 , pp. 1547-1552
    • Lisec, T.1    Kreutzer, M.2    Wagner, B.3
  • 7
    • 0032048646 scopus 로고    scopus 로고
    • A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation
    • Bruyker D.D., Cozma A., Puers R. A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation. Sens. Actuators, A. 66:1998;70-75.
    • (1998) Sens. Actuators, a , vol.66 , pp. 70-75
    • Bruyker, D.D.1    Cozma, A.2    Puers, R.3
  • 9
    • 0032308176 scopus 로고    scopus 로고
    • Application of aluminium films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors
    • Stankevic V., Simkavicius C. Application of aluminium films as temperature sensors for the compensation of output thermal shift of silicon piezoresistive pressure sensors. Sens. Actuators, A. 71:1998;161-166.
    • (1998) Sens. Actuators, a , vol.71 , pp. 161-166
    • Stankevic, V.1    Simkavicius, C.2
  • 10
    • 0031081870 scopus 로고    scopus 로고
    • Electric drift of the bridge offset for pressure sensors and its utilisation
    • Sun Y., Sun X., Sun B., Meng Q. Electric drift of the bridge offset for pressure sensors and its utilisation. Sens. Actuators, A. 58:1997;249-256.
    • (1997) Sens. Actuators, a , vol.58 , pp. 249-256
    • Sun, Y.1    Sun, X.2    Sun, B.3    Meng, Q.4
  • 14
    • 0032047246 scopus 로고    scopus 로고
    • Photolithographic packaging of silicon pressure sensors
    • Krassow H., Campabadal F., Lora-Tamayo E. Photolithographic packaging of silicon pressure sensors. Sens. Actuators, A. 66:1998;279-283.
    • (1998) Sens. Actuators, a , vol.66 , pp. 279-283
    • Krassow, H.1    Campabadal, F.2    Lora-Tamayo, E.3
  • 15
    • 0029310371 scopus 로고
    • Effects of process variations in a CMOS circuit for temperature compensation of piezoresistive pressure sensors
    • Gakkestad J., Ohlckers P., Halbo L. Effects of process variations in a CMOS circuit for temperature compensation of piezoresistive pressure sensors. Sens. Actuators, A. 48:1995;, 63-71.
    • (1995) Sens. Actuators, a , vol.48 , pp. 63-71
    • Gakkestad, J.1    Ohlckers, P.2    Halbo, L.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.