Long-term stability of metal lines, polysilicon gauges, and ohmic contacts for harsh-environment pressure sensors

IEEE Sensors Journal

Volumn 6, Issue 6, 2006, Pages 1596-1601

  Andrei, Alexandru ^a   Malhaire, Christophe ^a   Brida, Sebastiano ^b   Barbier, Daniel ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^b Auxitrol SA Esterline Sensors Group   (France)

Author keywords

Ohmic contacts; Polysilicon; Pressure sensor; Reliability; Thermal aging

Indexed keywords

ALUMINUM COMPOUNDS; ELECTRIC RESISTANCE; OHMIC CONTACTS; PIEZOELECTRIC DEVICES; POLYSILICON; RELIABILITY; STABILITY; TITANIUM COMPOUNDS;

OHMIC-CONTACTS RESISTANCE; POLYSILICON GAUGES; PRESSURE SENSORS; THERMAL AGING;

SENSORS;

EID: 33845642639     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.884164     Document Type: Article

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