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Applied Physics Letters

Volumn 98, Issue 5, 2011, Pages

Nitrogenated amorphous InGaZnO thin film transistor

(5) Liu, Po Tsun a Chou, Yi Teh a Teng, Li Feng a Li, Fu Hai a Shieh, Han Ping a

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT STABILITY; ARGON GAS MIXTURES; CHANNEL LAYERS; DC REACTIVE SPUTTER; ELECTRICAL CHARACTERISTIC; ELECTRICAL RELIABILITY; IN-SITU; NITROGEN INCORPORATION; NITROGEN-DOPING; ROOM TEMPERATURE;

AMORPHOUS FILMS; ARGON; CARRIER MOBILITY; NITROGEN; THIN FILMS;

THIN FILM TRANSISTORS;

EID: 79951480696 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3551537 Document Type: Article

Times cited : (92)

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