Fabrication and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thin films

Nanotechnology

Volumn 22, Issue 10, 2011, Pages

  Takenaka, Kana ^a   Saidoh, Noriko ^a   Nishiyama, Nobuyuki ^a   Inoue, Akihisa ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CU-BASED; DOT ARRAY; DOT DIAMETER; GLASS TRANSITION PHENOMENA; GLASSY ALLOYS; HOLE DIAMETER; HOLE EDGE; MAGNETRON SPUTTERING METHOD; NANO-DEVICES; NANOHOLE ARRAYS; PROMISING MATERIALS; SI SUBSTRATES; SMOOTH SURFACE; SUPERCOOLED LIQUID REGION; SURFACE OBSERVATION; SURFACE PLANES;

ALLOYS; COPPER ALLOYS; GLASS TRANSITION; METALLIC GLASS; SEMICONDUCTING SILICON COMPOUNDS; SUPERCOOLING; SURFACES; THIN FILMS; ZIRCONIUM;

COPPER;

EID: 79751473124     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/10/105302     Document Type: Article

References (23)

1. Osaka T, Asahi T, Kawaji J and Yokoshima T 2005 Electrochim. Acta 50 4576
2. Austin R H, Brody J P, Cox E C, Duke T and Volkmuth W 1997 Phys. Today 50 32
3. Cheng X, Hong Y, Kanicki J and Guo L J 2002 J. Vac. Sci. Technol. B 20 2877
4. Guo L J 2007 Adv. Mater. 19 495
5. Matsuda H and Fukuda K 1995 Science 268 1466
6. Chou S Y, Krauss P R and Renstorm P J 1995 Appl. Phys. Lett. 67 3114
7. Chou S Y, Krauss P R and Renstorm P J 1996 Science 272 85
8. Inoue A 2000 Acta Mater. 48 279
9. Patterson J P and Jones D R H 1987 Mater. Res. Bull. 13 583
10. Saotome Y, Imai K, Shioda S, Shimizu S, Zhang T and Inoue A 2002 Intermetallics 10 1241
11. Schroers J, Pham Q and Desai A 2007 J. Microelectromech. Syst. 16 240
12. Kumar G, Tang H X and Schroers J 2009 Nature 457 868
13. Jeong H W, Hata S and Shimokohbe A 2003 J. Microelectromech. Syst. 12 42
14. Sharma P, ZhangW, Amiya K, Kimura H M and Inoue A 2005 J. Nanosci. Nanotechnol. 5 416
15. Sharma P, Kaushik N, Kimura H M, Saotome Y and Inoue A 2007 Nanotechnology 18 035302
16. Liu Y, Hata S, Wada K and Shimokohbe A 2001 Japan. J. Appl. Phys. 40 5382
17. Saotome Y, Imai K and Sawanobori N 2003 J. Mater. Process. Technol. 14 379
18. Inoue A and Zhang T 1996 Mater. Trans. JIM 37 185
19. Inoue A, Nishiyama N and Kimura H M 1997 Mater. Trans. JIM 38 179
20. Zhang Q, Zhang W and Inoue A 2007 Mater. Trans. JIM 48 629
21. Shen X J, Pan L W and Lin L 2002 Sensors Actuators A 97/98 428
22. Rowland H D and King W P 2004 J. Micromech. Microeng. 14 1625
23. Rowland H D, Sun A C, Schunk P R and King W P 2005 J. Micromech. Microeng. 15 2414