Thermoplastic forming of bulk netallic glass - A technology for MEMS and microstructure fabrication

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 240-247

  Schroers, Jan ^a,b   Pham, Quoc ^a   Desai, Amish ^c  

^a LIQUIDMETAL TECHNOLOGIES   (United States)

^b Yale University   (United States)

^c Tanner Research Inc   (United States)

Author keywords

Amorphous materials; Bulk metallic glass; Materials processing; Microelectromechanical devices; Nanotechnology; Thermoplastic processing

Indexed keywords

AMORPHOUS MATERIALS; FABRICATION; MEMS; METALLOGRAPHIC MICROSTRUCTURE; NANOTECHNOLOGY; THERMOFORMING;

BULK METALLIC GLASS; MICROSTRUCTURE FABRICATION;

METALLIC GLASS;

EID: 34147115130     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.0007.892889     Document Type: Article

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