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Volumn 315, Issue 1, 2011, Pages 224-228

Investigation of nitride MOVPE at high pressure and high growth rates in large production reactors by a combined modelling and experimental approach

(7) Dauelsberg, M a Brien, D a Psche, R a Schn, O a Yakovlev, E V b Segal, A S b Talalaev, R A b

a AIXTRON AG (Germany)

b SOFT IMPACT LTD (Russian Federation)

Author keywords

A1. Computer simulation; A1. Gas phase kinetics; A3. Metalorganic vapor phase epitaxy; B1. Nitrides

Indexed keywords

6 INCH WAFERS; A1. COMPUTER SIMULATION; A1. GAS PHASE KINETICS; B1. NITRIDES; COMPUTATIONAL MODEL; EXPERIMENTAL APPROACHES; GAS-PHASE NUCLEATION; GAS-PHASE REACTIONS; GROWTH EFFICIENCY; HIGH GROWTH RATE; HIGH PRESSURE; METAL ORGANIC PRECURSORS; METAL-ORGANIC VAPOR PHASE EPITAXY; MOVPE; PARAMETER VARIATION; PLANETARY REACTORS; PRODUCTION SCALE; RESIDENCE TIME; UNIFORM LAYER;

COMPUTATIONAL METHODS; COMPUTER SIMULATION; EPITAXIAL GROWTH; GALLIUM NITRIDE; METALLORGANIC VAPOR PHASE EPITAXY; NUCLEATION; REACTION KINETICS; VAPORS;

PETROLEUM REFINING;

EID: 79551681459 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2010.07.064 Document Type: Article

Times cited : (18)

References (10)

1
- 33846449493
- M. Dauelsberg, C. Martin, H. Protzmann, A.R. Boyd, E.J. Thrush, J. Kppeler, M. Heuken, R.A. Talalaev, E.V. Yakovlev, and A.V. Kondratyev J. Cryst. Growth 298 2007 418 424
- (2007) J. Cryst. Growth , vol.298 , pp. 418-424
- Dauelsberg, M.¹ Martin, C.² Protzmann, H.³ Boyd, A.R.⁴ Thrush, E.J.⁵ Kppeler, J.⁶ Heuken, M.⁷ Talalaev, R.A.⁸ Yakovlev, E.V.⁹ Kondratyev, A.V.¹⁰

2
- 0346154900
- J.R. Creighton, G.T. Wang, W.G. Breiland, and M.E. Coltrin J. Cryst. Growth 261 2004 204 213
- (2004) J. Cryst. Growth , vol.261 , pp. 204-213
- Creighton, J.R.¹ Wang, G.T.² Breiland, W.G.³ Coltrin, M.E.⁴

3
- 49449085239
- K. Matsumoto, H. Tokunaga, A. Ubukata, K. Ikenaga, Y. Fukuda, T. Tabuchi, Y. Kitamura, S. Koseki, A. Yamaguchi, and K. Uematsu J. Cryst. Growth 310 2008 3950 3952
- (2008) J. Cryst. Growth , vol.310 , pp. 3950-3952
- Matsumoto, K.¹ Tokunaga, H.² Ubukata, A.³ Ikenaga, K.⁴ Fukuda, Y.⁵ Tabuchi, T.⁶ Kitamura, Y.⁷ Koseki, S.⁸ Yamaguchi, A.⁹ Uematsu, K.¹⁰

4
- 17544362083
- A. Hirako, K. Kusakabe, and K. Ohkawa Jpn. J. Appl. Phys. 44 2005 874 879
- (2005) Jpn. J. Appl. Phys. , vol.44 , pp. 874-879
- Hirako, A.¹ Kusakabe, K.² Ohkawa, K.³

5
- 0032477164
- T.G. Mihopoulos, V. Gupta, and K.F. Jensen J. Cryst. Growth 195 1998 733 739
- (1998) J. Cryst. Growth , vol.195 , pp. 733-739
- Mihopoulos, T.G.¹ Gupta, V.² Jensen, K.F.³

6
- 30344469376
- M.E. Coltrin, J.R. Creighton, and C.C. Mitchell J. Cryst. Growth 287 2006 566 571
- (2006) J. Cryst. Growth , vol.287 , pp. 566-571
- Coltrin, M.E.¹ Creighton, J.R.² Mitchell, C.C.³

7
- 0036643721
- A.N. Vorobev, S.Yu. Karpov, M.V. Bogdanov, A.E. Komissarov, O.V. Bord, A.I. Zhmakin, and Yu.N. Makarov Comput. Mater. Sci. 24 2002 520 534
- (2002) Comput. Mater. Sci. , vol.24 , pp. 520-534
- Vorobev, A.N.¹ Karpov, S.Yu.² Bogdanov, M.V.³ Komissarov, A.E.⁴ Bord, O.V.⁵ Zhmakin, A.I.⁶ Makarov . Y, N.⁷

8
- 56249110575
- E.V. Yakovlev, R.A. Talalaev, A.S. Segal, A.V. Lobanova, W.V. Lundin, E.E. Zavarin, M.A. Sinitsyn, A.F. Tsatsulnikov, and A.E. Nikolaev J. Cryst. Growth 310 2008 4862 4866
- (2008) J. Cryst. Growth , vol.310 , pp. 4862-4866
- Yakovlev, E.V.¹ Talalaev, R.A.² Segal, A.S.³ Lobanova, A.V.⁴ Lundin, W.V.⁵ Zavarin, E.E.⁶ Sinitsyn, M.A.⁷ Tsatsulnikov, A.F.⁸ Nikolaev, A.E.⁹

9
- 0035426404
- R.A. Talalaev, E.V. Yakovlev, S.Yu. Karpov, and Yu.N. Makarov J. Cryst. Growth 230 2001 232 238
- (2001) J. Cryst. Growth , vol.230 , pp. 232-238
- Talalaev, R.A.¹ Yakovlev, E.V.² Karpov, S.Yu.³ Makarov . Y, N.⁴

10
- 30344445690
- W.V. Lundin, E.E. Zavarin, D.S. Sizov, M.A. Sinitsyn, A.F. Tsatsulnikov, A.V. Kondratyev, E.V. Yakovlev, and R.A. Talalaev J. Cryst. Growth 287 2006 605 609
- (2006) J. Cryst. Growth , vol.287 , pp. 605-609
- Lundin, W.V.¹ Zavarin, E.E.² Sizov, D.S.³ Sinitsyn, M.A.⁴ Tsatsulnikov, A.F.⁵ Kondratyev, A.V.⁶ Yakovlev, E.V.⁷ Talalaev, R.A.⁸

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