Hydrogen effects in III-nitride MOVPE

Journal of Crystal Growth

Volumn 310, Issue 23, 2008, Pages 4862-4866

  Yakovlev, E V ^a   Talalaev, R A ^a   Segal, A S ^a   Lobanova, A V ^a   Lundin, W V ^b   Zavarin, E E ^b   Sinitsyn, M A ^b   Tsatsulnikov, A F ^b   Nikolaev, A E ^b  

^a SOFT IMPACT LTD   (Russian Federation)

^b IOFFE INSTITUTE   (Russian Federation)

Author keywords

A1. Computer simulation; A1. Etching; A3. Metalorganic vapor phase epitaxy; A3. Selective epitaxy; B1. Nitrides

Indexed keywords

ADATOMS; COMPUTATIONAL METHODS; CRYSTAL GROWTH; ETCHING; HYDROGEN; METALLORGANIC VAPOR PHASE EPITAXY; NITRIDES;

A1. COMPUTER SIMULATION; A1. ETCHING; A3. METALORGANIC VAPOR PHASE EPITAXY; A3. SELECTIVE EPITAXY; B1. NITRIDES;

SURFACES;

EID: 56249110575     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.07.099     Document Type: Article

References (10)

1. E.E. Zavarin, D.S. Sizov, W.V. Lundin, A.F. Tsatsulnikov, R.A. Talalaev, A.V. Kondratyev, O.V. Bord, in: A. Devi, R. Fischer, H. Parala, M.D. Allendorf, M.L. Hitchman (Eds.), Proceedings of the Fifteenth International European Conference on Chemical Vapor Deposition (EUROCVD-15), vol. 2005-09, Bochum, Germany, 2005, Electrochemical Society, NJ, USA, 2005, p. 299.
2. Mayumi M., Satoh F., Kumagai Y., Takemoto K., and Koukitu A. J. Crystal Growth 237-239 (2002) 1143
3. Koleske D.D., Coltrin M.E., Allerman A.A., Cross K.C., Mitchell C.C., and Figiel J.J. Appl. Phys. Lett. 82 (2003) 1170
4. Kondratyev A.V., Talalaev R.A., Segal A.S., Yakovlev E.V., Lundin W.V., Zavarin E.E., Sinitsyn M.A., Tsatsulnikov A.F., and Nikolaev A.E. Phys. Stat. Sol. (c) 5 6 (2008) 1691
5. Kapolnek D., Keller S., Vetury R., Underwood R.D., Kozodoy P., Den Baars S.P., and Mishra U.K. Appl. Phys. Lett. 74 9 (1997) 1204
6. Marchand H., Ibbetson J.P., Fini P.T., Wu X.H., Keller S., DenBaars S.P., Speck J.S., and Mishra U.K. MRS Internet J. Nitride Semicond. Res. 4S1 (1999) G4.5
7. W.V. Lundin, E.E. Zavarin, A.E. Nikolaev, M.A. Sinitsyn, A.V. Sakharov, D.S. Sizov, R.A. Talalaev, A.V. Lobanova, A.F. Tsatsulnikov, Extended Abstracts of the 12th European Workshop on Metalorganic Vapour Phase Epitaxy, June 3-6, Bratislava, Slovakia, 2007, p. 57.
8. Ludin W.V., Zavarin E.E., and Sizov D.S. Tech. Phys. Lett. 31 4 (2005) 293
9. Taniyasu Y., and Yoshikawa A. J. Electron. Mater. 30 11 (2001) 1402
10. Lundin W.V., Nikolaev A.E., Sakharov A.V., and Tsatsul'nikov A.F. Semiconductors 42 (2008) 232