Formation of ultrananocrystalline diamond/amorphous carbon composite films in vacuum using coaxial arc plasma gun

Japanese Journal of Applied Physics

Volumn 49, Issue 12, 2010, Pages

  Hanada, Kenji ^a   Yoshida, Tomohiro ^a   Nakagawa, You ^a   Yoshitake, Tsuyoshi ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON (A-C); ARC PLASMA; C-H BOND; CARBON COMPOSITES; HYDROGEN ATMOSPHERE; IN-VACUUM; NEAR-EDGE X-RAY ABSORPTION; ULTRANANOCRYSTALLINE DIAMONDS; X-RAY DIFFRACTION MEASUREMENTS; X-RAY PHOTOEMISSION SPECTRA;

ABSORPTION SPECTROSCOPY; AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON CARBON COMPOSITES; CARBON FILMS; CRYSTALLITE SIZE; EMISSION SPECTROSCOPY; NUCLEATION; PLASMA DEPOSITION; PLASMA GUNS; VACUUM; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; X RAYS;

COMPOSITE FILMS;

EID: 79551648537     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.125503     Document Type: Article

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