Structural and physical characteristics of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films deposited using a coaxial arc plasma gun

Japanese Journal of Applied Physics

Volumn 49, Issue 1 Part 1, 2010, Pages

  Yoshitake, Tsuyoshi ^a   Nakagawa, You ^a   Nagano, Akira ^a   Ohtani, Ryota ^b   Setoyama, Hiroyuki ^b   Kobayashi, Eiichi ^b   Sumitani, Kazushi ^b   Agawa, Yoshiaki ^c   Nagayama, Kunihito ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b Kyushu Synchrotron Light Research Center   (Japan)

^c Ulvac Riko Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARC PLASMA; FOURIER TRANSFORM INFRARED ABSORPTION SPECTRUM; HYDROGEN ATOMS; HYDROGENATED AMORPHOUS CARBON (A-C:H); OPTICAL ABSORPTION COEFFICIENTS; PHOTOEMISSION SPECTRA; PHOTON ENERGY; PHYSICAL CHARACTERISTICS; ULTRANANOCRYSTALLINE DIAMONDS;

ABSORPTION; ABSORPTION SPECTROSCOPY; AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON CARBON COMPOSITES; CARBON FILMS; CAVITY RESONATORS; CRYSTALLITES; DANGLING BONDS; EMISSION SPECTROSCOPY; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; HYDROGEN BONDS; INFRARED SPECTROSCOPY; LIGHT ABSORPTION; PLASMA GUNS; PLASMAS; X RAY DIFFRACTION;

COMPOSITE FILMS;

EID: 77950814007     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.49.015503     Document Type: Article

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