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Journal of Vacuum Science and Technology B

Volumn 29, Issue 1, 2011, Pages 0110121-0110124

13 nm high-efficiency nickel-germanium soft x-ray zone plates

(6) Reinspach, Julia a Lindblom, Magnus a Bertilson, Michael a Von Hofsten, Olov a Hertz, Hans M a Holmberg, Anders a

a ROYAL INSTITUTE OF TECHNOLOGY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DIFFRACTION EFFICIENCY; EFFICIENCY; FABRICATION; GERMANIUM; NANOTECHNOLOGY; NICKEL; PLATES (STRUCTURAL COMPONENTS);

CRUCIAL PARAMETERS; HIGH RESOLUTION; HIGH-EFFICIENCY; NANOFABRICATION PROCESS; NI ELECTROPLATING; TRI-LAYER RESIST PROCESS; X RAY MICROSCOPY; ZONE PLATES;

X RAYS;

EID: 79551627215 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3520457 Document Type: Conference Paper

Times cited : (13)

References (12)

1
- 0003920042
- (Cambridge University Press, Cambridge)
- D. T. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation (Cambridge University Press, Cambridge, 1999), pp. 337-394.
- (1999) Soft X-Rays and Extreme Ultraviolet Radiation , pp. 337-394
- Attwood, D.T.¹

2
- 79551642088
- 1742-6588.
- C. David, F. Nolting, F. Pfeiffer, C. Quitmann, and M. Stampanoni, J. Phys.: Conf. Ser. 1742-6588 186 (2009).
- (2009) J. Phys.: Conf. Ser. , vol.186
- David, C.¹ Nolting, F.² Pfeiffer, F.³ Quitmann, C.⁴ Stampanoni, M.⁵

3
- 0035831810
- 0003-6951, 10.1063/1.1361285
- M. Peuker, Appl. Phys. Lett. 0003-6951 78, 2208 (2001). 10.1063/1.1361285
- (2001) Appl. Phys. Lett. , vol.78 , pp. 2208
- Peuker, M.¹

4
- 0001129090
- 1071-1023, 10.1116/1.589747
- S. J. Spector, C. J. Jacobsen, and D. M. Tennant, J. Vac. Sci. Technol. B 1071-1023 15, 2872 (1997). 10.1116/1.589747
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2872
- Spector, S.J.¹ Jacobsen, C.J.² Tennant, D.M.³

5
- 64549134292
- 1071-1023, 10.1116/1.3089371
- M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 1071-1023 27, L1 (2009). 10.1116/1.3089371
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 1
- Lindblom, M.¹ Reinspach, J.² Von Hofsten, O.³ Bertilson, M.⁴ Hertz, H.M.⁵ Holmberg, A.⁶

6
- 70349665354
- 1094-4087, 10.1364/OE.17.017669
- W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, Opt. Express 1094-4087 17, 17669 (2009). 10.1364/OE.17.017669
- (2009) Opt. Express , vol.17 , pp. 17669
- Chao, W.¹ Kim, J.² Rekawa, S.³ Fischer, P.⁴ Anderson, E.H.⁵

7
- 72849123318
- 1071-1023, 10.1116/1.3237140
- J. Reinspach, M. Lindblom, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 1071-1023 27, 2593 (2009). 10.1116/1.3237140
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 2593
- Reinspach, J.¹ Lindblom, M.² Von Hofsten, O.³ Bertilson, M.⁴ Hertz, H.M.⁵ Holmberg, A.⁶

8
- 0016037493
- 0030-3941, 10.1364/JOSA.64.000301
- J. Kirz, J. Opt. Soc. Am. 0030-3941 64, 301 (1974). 10.1364/JOSA.64. 000301
- (1974) J. Opt. Soc. Am. , vol.64 , pp. 301
- Kirz, J.¹

9
- 70449726046
- 1071-1023, 10.1116/1.3117256
- M. Lindblom, J. Reinspach, O. von Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 1071-1023 27, L5 (2009). 10.1116/1.3117256
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 5
- Lindblom, M.¹ Reinspach, J.² Von Hofsten, O.³ Bertilson, M.⁴ Hertz, H.M.⁵ Holmberg, A.⁶

10
- 76949092001
- 0167-9317, 10.1016/j.mee.2009.11.012
- J. Reinspach, M. Lindblom, O. von. Hofsten, M. Bertilson, H. M. Hertz, and A. Holmberg, Microelectron. Eng. 0167-9317 87, 1583 (2010). 10.1016/j.mee.2009.11.012
- (2010) Microelectron. Eng. , vol.87 , pp. 1583
- Reinspach, J.¹ Lindblom, M.² Von. Hofsten, O.³ Bertilson, M.⁴ Hertz, H.M.⁵ Holmberg, A.⁶

11
- 2542479378
- 0167-9317, 10.1016/S0167-9317(04)00174-1
- A. Holmberg, S. Rehbein, and H. M. Hertz, Microelectron. Eng. 0167-9317 73-74, 639 (2004). 10.1016/S0167-9317(04)00174-1
- (2004) Microelectron. Eng. , vol.7374 , pp. 639
- Holmberg, A.¹ Rehbein, S.² Hertz, H.M.³

12
- 33847677594
- Laboratory arrangement for soft x-ray zone plate efficiency measurements
- DOI 10.1063/1.2472590
- M. Bertilson, P. A. C. Takman, U. Vogt, A. Holmberg, and H. M. Hertz, Rev. Sci. Instrum. 0034-6748 78, 026103 (2007). 10.1063/1.2472590 (Pubitemid 46363047)
- (2007) Review of Scientific Instruments , vol.78 , Issue.2 , pp. 026103
- Bertilson, M.C.¹ Takman, P.A.C.² Holmberg, A.³ Vogt, U.⁴ Hertz, H.M.⁵

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