High-aspect-ratio germanium zone plates fabricated by reactive ion etching in chlorine

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages

  Lindblom, Magnus ^a   Reinspach, Julia ^a   Von Hofsten, Olov ^a   Bertilson, Michael ^a   Hertz, Hans M ^a   Holmberg, Anders ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLIC EXPOSURES; DEGREE OF ANISOTROPIES; ELECTROPLATING PROCESS; FABRICATION PROCESS; FIRST ORDERS; HALF-PITCH GRATINGS; HIGH ASPECT RATIOS; REACTIVE IONS; REACTIVE-ION ETCHINGS; REPRODUCIBILITY; SIDEWALL PASSIVATIONS; SOFT X-RAYS; THEORETICAL VALUES; ZONE PLATES;

ASPECT RATIO; CHLORINE; FABRICATION; GERMANIUM; OPTICAL INSTRUMENTS; PASSIVATION; PLATES (STRUCTURAL COMPONENTS);

REACTIVE ION ETCHING;

EID: 64549134292     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3089371     Document Type: Article

References (25)

1. X-Ray Microscopy, edited by, S. Aoki, Y. Kagoshima, and, Y. Suzuki, (The Institute of Pure and Applied Physics, Tokyo, Japan, 2006), Vol. 7.
2. A. G. Michette, Optical Systems for Soft X-Rays (Plenum, New York, 1986).
3. S. Mehdizadeh, J. Dukovic, P. C. Andricacos, L. T. Romankiw, and H. Y. Cheh, J. Electrochem. Soc. 0013-4651 10.1149/1.2221118 140, 3497 (1993).
4. M. Peuker, Appl. Phys. Lett. 0003-6951 10.1063/1.1361285 78, 2208 (2001).
5. M. Lindblom, H. M. Hertz, and A. Holmberg, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2395953 24, 2848 (2006).
6. A. C. West, M. Matlosz, and D. Landolt, J. Electrochem. Soc. 0013-4651 10.1149/1.2085666 138, 728 (1991).
7. A. Holmberg, M. Lindblom, and H. M. Hertz, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2362761 24, 2592 (2006).
8. D. Weiss, M. Peuker, and G. Schneider, Appl. Phys. Lett. 0003-6951 10.1063/1.121190 72, 1805 (1998).
9. D. L. Olynick, B. D. Harteneck, E. Veklerov, M. Tendulkar, J. A. Liddle, A. L. D. Kilcoyne, and T. Tyliszczak, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1815298 22, 3186 (2004).
10. M. Lindblom, H. M. Hertz, and A. Holmberg, Microelectron. Eng. 84, 1136 (2007).
11. R. Hilkenbach, J. Thieme, P. Guttmann, and B. Niemann, X-Ray Microscopy II (Springer, Heidelberg, Germany, 1988), p. 95.
12. C. David, J. Thieme, P. Guttmann, G. Schneider, D. Rudolph, and G. Schmahl, Optik (Stuttgart) 91, 95 (1992).
13. J. Thieme, D. Rudolph, G. Schmahl, P. Guttmann, B. Greinke, and M. Diehl, X-Ray Microscopy III (Springer, Heidelberg, Germany, 1992), p. 83.
14. C. David, N. Fay, R. Medenwaldt, M. Diehl, and J. Thieme, Proceedings of the Fourth International Conference on X-Ray Microscopy (Institute of Microelectronics Technology, Chernogolovka, Russia, 1994), p. 536.
15. G. Schneider, T. Schliebe, and H. Aschoff, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.588271 13, 2809 (1995).
16. C. David, B. Kaulich, R. Medenwaldt, M. Hettwer, N. Fay, M. Diehl, and J. Thieme, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.588261 13, 2762 (1995).
17. S. J. Spector, C. J. Jacobsen, and D. M. Tennant, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.589747 15, 2872 (1997).
18. T. Schliebe and G. Schneider, X-Ray Microscopy and Spectromicroscopy (Springer, Heidelberg, Germany, 1998), p. IV-3.
19. M. Bertilson, P. A. C. Takman, U. Vogt, A. Holmberg, and H. M. Hertz, Rev. Sci. Instrum. 0034-6748 10.1063/1.2472590 78, 026103 (2007).
20. J. Kirz, J. Opt. Soc. Am. 0030-3941 10.1364/JOSA.64.000301 64, 301 (1974).
21. A. M. Muthukrishnan, K. Amberiadis, and A. ElshabiniRiad, J. Electrochem. Soc. 0013-4651 10.1149/1.1837679 144, 1780 (1997).
22. F. Fracassi and R. Dagostino, Pure Appl. Chem. 0033-4545 10.1351/pac199264050703 64, 703 (1992).
23. R. d'Agostino, F. Fracassi, C. Pacifico, and P. Capezzuto, J. Appl. Phys. 0021-8979 10.1063/1.350679 71, 462 (1992).
24. S. L. Lehoczky, R. J. Lederich, and J. J. Bellina, Thin Solid Films 0040-6090 10.1016/0040-6090(78)90080-9 55, 125 (1978).
25. C. Sittig, M. Textor, N. D. Spencer, M. Wieland, and P. H. Vallotton, J. Mater. Sci.: Mater. Med. 0957-4530 10.1023/A:1008840026907 10, 35 (1999).