Laboratory arrangement for soft x-ray zone plate efficiency measurements

Review of Scientific Instruments

Volumn 78, Issue 2, 2007, Pages

  Bertilson, Michael C ^a   Takman, Per A C ^a   Holmberg, Anders ^a   Vogt, Ulrich ^a   Hertz, Hans M ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DIFFRACTION; LASER BEAMS; PHOTONS; PLASMA THEORY; X RAYS;

EMISSION FLUCTUATIONS; MICRO ZONE PLATES; REFERENCE SIGNALS;

PLATES (STRUCTURAL COMPONENTS);

EID: 33847677594     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2472590     Document Type: Article

References (11)

1. X-Ray Microscopy, edited by, S. Aoki, Y. Kagoshima, and, Y. Suzuki, (The Institute of Pure and Applied Physics, Tokyo, Japan, 2006).
2. D. T. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation (Cambridge University Press, Cambridge, 1999).
3. A. Holmberg, S. Rehbein, and H. M. Hertz, Microelectron. Eng. 73-74, 639 (2004).
4. M. Peuker, Appl. Phys. Lett. 78, 2208 (2001).
5. M. Peuker, G. Schneider, and D. Weiss, Proc. SPIE 3449, 118 (1998).
6. E. Ahlqvist, Diploma thesis, Biomedical and X-Ray Physics, Royal Institute of Technology, Stockholm, 2004.
7. M. Peuker, Elektronenstrahllithographie und Nanostrukturübertragung zur Herstellung von Hochauflösenden Diffraktiven Röntgenoptiken aus Nickel (Cuvillier Verlag, Göttingen, 2000).
8. P. A. C. Jansson, U. Vogt, and H. M. Hertz, Rev. Sci. Instrum. 76, 43503 (2005).
9. T. Wilhein, D. Hambach, B. Niemann, M. Berglund, L. Rymell, and H. M. Hertz, Appl. Phys. Lett. 71, 190 (1997).
10. H. W. Schnopper, L. P. Van Speybroeck, J. P. Devaille, A. Epstein, E. Kallne, R. Z. Bachrach, J. Dijkstra, and L. Lantward, Appl. Opt. 16, 1088 (1977).
11. A. N. Kurokhtin and A. V. Popov, J. Opt. Soc. Am. A 19, 315 (2002).