Nickel-germanium soft x-ray zone plates

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 27, Issue 3, 2009, Pages

  Lindblom, Magnus ^a   Reinspach, Julia ^a   Von Hofsten, Olov ^a   Bertilson, Michael ^a   Hertz, Hans M ^a   Holmberg, Anders ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DIFFRACTION EFFICIENCY; GERMANIUM; OPTICAL INSTRUMENTS; PLATES (STRUCTURAL COMPONENTS); X RAY DIFFRACTION;

FABRICATION PROCESS; GERMANIUM FILMS; HARDMASKS; HIGH ASPECT RATIO; HIGH EFFICIENCY; HIGH RESOLUTION; PLASMA ETCH; SOFT X-RAY; ZONE PLATES;

NICKEL;

EID: 70449726046     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3117256     Document Type: Conference Paper

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