Oxide removal from GaN(0001) surfaces

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 6, Issue SUPPL. 2, 2009, Pages

  Schulz, C H ^a   Schmidt, T H ^a   Flege, J I ^a   Berner, N ^a   Tessarek, C H ^a   Hommel, D ^a   Falta, J ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CLEANING METHODS; DESORPTION CYCLE; GLOVEBOXES; MOVPE; NITROGEN ATMOSPHERES; OXIDE REMOVAL; PLASMA TREATMENT; RESIDUAL OXYGEN; THERMAL-ANNEALING;

DESORPTION; GALLIUM ALLOYS; GALLIUM NITRIDE; OXYGEN; PLASMA APPLICATIONS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 79251609526     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200880845     Document Type: Article

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