Japan's contributions to ion beam technologies

AIP Conference Proceedings

Volumn 1321, Issue , 2010, Pages 1-8

  Yamada, Isao ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

cluster ion; IIT; ion implantation; polyatomic ion; semiconductor industry; surface modification

Indexed keywords

EID: 79251563430     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3548348     Document Type: Conference Paper

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