Summary of industry-academia collaboration projects on cluster ion beam process technology

AIP Conference Proceedings

Volumn 1066, Issue , 2008, Pages 415-418

  Yamada, Isao ^a   Matsuo, Jiro ^b   Toyoda, Noriaki ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Cluster ion beam; Cluster size; Shallow implantation; Surface damage; Surface smoothing

Indexed keywords

EID: 79251580022     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.3033651     Document Type: Conference Paper

References (1)

1. NEDO contract number P2048, Project leader I. Yamada, sub-leaders J. Matsuo and N. Toyoda. This paper is based on the information from the NEDO final report (in Japanese), Public version, October 31, 2007. URL: www.nedo.go.jp/iinkai/kenkyuu/bunkakai/19h/jigo/8/1/5-1-1.pdf