Progress in Japanese frontier projects on ion beam processing of advanced materials

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 112, Issue 1-4, 1996, Pages 233-241

  Hattori, K ^a  

^a Ministry of International Trade and Industry   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL ECONOMICS; INTELLIGENT MATERIALS; RESEARCH AND DEVELOPMENT MANAGEMENT; SEMICONDUCTOR DEVICE MANUFACTURE;

ION BEAM PROCESSING;

ION BEAM LITHOGRAPHY;

EID: 0030563368     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01230-3     Document Type: Article

References (19)

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3. ACTA (Advanced Chemical Processing Technology Research Association) Leaflet, 10-6 Hisamatsu-cho Nihonbashi, Chuuo-ku, Tokyo 103, Japan.
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6. ACTA R&D Report '94, 10-6 Hisamatsu-cho Nihonbashi, Chuuo-ku, Tokyo 103, Japan (Sumitomo Metal Mining Co., Ltd.) p. 23.
7. M. Minato and Y. Itoh, J. Vac. Sci. Technol. A 13 (1995) 540; M. Minato, 38th Ann. Technical Conf. Proc. of the Society of Vacuum Coaters (1995) in press.
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9. ACTA R&D Report '94, 10-6 Hisamatsu-cho Nihonbashi, Chuuo-ku, Tokyo 103, Japan (Sumitomo Electric Ind., Ltd.) p. 130.
10. N. Kuratani, O. Imai, A. Ebe, S. Nishiyama and K. Ogata, Surface and Coating Technology 66 (1994) 310.
11. ACTA R&D Report '94, 10-6 Hisamatsu-cho Nihonbashi, Chuuo-ku, Tokyo 103, Japan (Nissin Electric Co., Ltd.) p. 90.
12. Ibid. (Ishikawajima-harima Heavy Industries Co., Ltd.) p. 104.
13. Ibid. (Matsushita Electric Industrial Co., Ltd.) p. 115.
14. R. Malhotora, ACT Symp. Text (1994) p. 145.
15. Non-linear Photonics Materials Project R&D Report '94, Japan High Polymer Center, Komuro Bldg. 8F, 2-5-3 Kuramae, Taito-ku, Tokyo 111, Japan.
16. Ultimate Munipulation of Atoms and Molecules Project R&D Report '94, Angstrom Technology Partnership R&D Annual Report '94, Ryukakusan Bldg. 8F, 2-5-12 Higashi-Kanda, Chiyoda-ku, Tokyo 101, Japan.
17. Ultimate Munipulation of Atoms and Molecules Project R&D Report '94, Angstrom Technology Partnership R&D Annual Report '94, Ryukakusan Bldg. 8F, 2-5-12 Higashi-Kanda, Chiyoda-ku, Tokyo 101, Japan.
18. Ultimate Munipulation of Atoms and Molecules Project R&D Report '94, Angstrom Technology Partnership R&D Annual Report '94, Ryukakusan Bldg. 8F, 2-5-12 Higashi-Kanda, Chiyoda-ku, Tokyo 101, Japan.
19. Ultimate Munipulation of Atoms and Molecules Project R&D Report '94, Angstrom Technology Partnership R&D Annual Report '94, Ryukakusan Bldg. 8F, 2-5-12 Higashi-Kanda, Chiyoda-ku, Tokyo 101, Japan.