20 years history of fundamental research on gas cluster ion beams, and current status of the applications to industry

AIP Conference Proceedings

Volumn 866, Issue , 2006, Pages 147-154

  Yamada, Isao ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Cluster ion beams; Lateral sputtering; Shallow implantation; Surface smoothing

Indexed keywords

EID: 33846959478     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2401482     Document Type: Conference Paper

References (16)

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