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Volumn 504, Issue , 1999, Pages 69-79
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Advances in ion and laser beam technology: Achievements of Japanese government and University projects
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CONDUCTIVE FILMS;
ETCHING;
ION BEAMS;
ION IMPLANTATION;
LASER BEAMS;
OPTICAL FILTERS;
SPUTTER DEPOSITION;
TECHNOLOGY TRANSFER;
THIN FILM CIRCUITS;
TRANSPARENCY;
ION BEAM TECHNOLOGY;
LASER BEAM TECHNOLOGY;
MATERIALS SCIENCE;
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EID: 0032655967
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (30)
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