Direct observation of the 1/E dependence of time dependent dielectric breakdown in the presence of copper

Applied Physics Letters

Volumn 98, Issue 3, 2011, Pages

  Zhao, Larry ^a,b   Tokei, Zsolt ^a   Croes, Kristof ^a   Wilson, Christopher J ^a   Baklanov, Mikhail ^a   Beyer, Gerald P ^a   Claeys, Cor ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER MATERIAL; DATA EXTRAPOLATION; DIRECT OBSERVATION; E-MODEL; FIELD ACCELERATION; METAL INSULATOR SEMICONDUCTOR CAPACITORS; POWER LAW MODEL; SILICON DIOXIDE; TDDB LIFETIME; TIME DEPENDENT DIELECTRIC BREAKDOWN; TIME TO FAILURE; TIME-DEPENDENT DIELECTRIC BREAKDOWN LIFETIMES;

ELECTRIC BREAKDOWN; ELECTRIC FIELD MEASUREMENT; ELECTRIC FIELDS; METAL INSULATOR BOUNDARIES; MIS DEVICES; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICA;

DIELECTRIC MATERIALS;

EID: 79251554418     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3543850     Document Type: Article

References (16)

1. D. C. Crook, Proceedings of International Reliability Physics Symposium, Piscataway, NJ, 1979, p. 1.
2. E. S. Anolick and G. Nelson, Proceedings of International Reliability Physics Symposium, Piscataway, NJ, 1979, p. 8.
3. A. Berman, Proceedings of International Reliability Physics Symposium, Piscataway, NJ, 1981, p. 204.
4. I. C. Chen, S. Holland, and C. Hu, Proceedings of International Reliability Physics Symposium, Piscataway, NJ, 1985, p. 24.
5. J. Lee, I. C. Chen, and C. Hu, Proceedings of International Reliability Physics Symposium, Piscataway, NJ, 1988, p. 131.
6. K. F. Schuegraph and C. Hu, Proceedings of International Reliability Physics Symposium, Piscataway, NJ, 1993, p. 7.
7. J. Sune and E. Wu, Proceedings of the Digest of Technical Papers on Symposium on VLSI Technology, 2001, p. 97.
8. W. Wu, X. Duan, and J. S. Yuan, Proceedings of International Reliability Physics Symposium, 2003, p. 282.
9. G. S. Haase, E. T. Ogawa, and J. W. McPherson, Proceedings of International Reliability Physics Symposium, 2005, p. 466.
10. J. R. Lloyd, E. Liniger, and T. M. Shaw, J. Appl. Phys. 0021-8979 98, 084109 (2005). 10.1063/1.2112171
11. F. Chen, B. Bravo, K. Chanda, P. McLaughlin, T. Sullivan, J. Gill, J. Lloyd, R. Kontra, and J. Aitken, Proceedings of International Reliability Physics Symposium, 2006, p. 46.
12. N. Suzumura, S. Yamamoto, D. Kodama, K. Makabe, J. Komori, E. Murakami, S. Maegawa, and K. Kubota, Proceedings of International Reliability Physics Symposium, 2006, p. 484.
13. R. S. Achanta, J. L. Plawsky, and W. N. Gill, Appl. Phys. Lett. 0003-6951 91, 234106 (2007). 10.1063/1.2823576
14. J. W. McPherson and H. C. Mogul, J. Appl. Phys. 0021-8979 84, 1513 (1998). 10.1063/1.368217
15. S. S. Hwang, S. Y. Jung, and Y. C. Joo, J. Appl. Phys. 0021-8979 101, 074501 (2007). 10.1063/1.2714668
16. L. Zhao, Z. Tokei, G. G. Gischia, M. Pantouvaki, K. Croes, and G. Beyer, Proceedings of International Reliability Physics Symposium, 2009, p. 848.