Breakdown characteristics of interconnect dielectrics

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 466-473

  Haase, Gaddi S ^a   Ogawa, Ennis T ^a   McPherson, Joe W ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION PARAMETER; INTERCONNECT DIELECTRICS; LINE-TO-LINE SPACING; RAMP-RATE;

ACTIVATION ENERGY; ELECTRIC POTENTIAL; ELECTRON MICROSCOPY; INTEGRATED CIRCUITS; INTERCONNECTION NETWORKS; PERMITTIVITY; RELIABILITY;

DIELECTRIC MATERIALS;

EID: 28744441002     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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