Effect of boron incorporation on the structure and electrical properties of diamond-like carbon films deposited by femtosecond and nanosecond pulsed laser ablation

Thin Solid Films

Volumn 518, Issue 5, 2009, Pages 1470-1474

  Sikora, A ^a   Bourgeois, O ^b   Sanchez Lopez, J C ^c   Rouzaud, J N ^d   Rojas, T C ^c   Loir, A S ^a   Garden, J L ^b   Garrelie, F ^a   Donnet, C ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

^b LABORATOIRE DE CRISTALLOGRAPHIE   (France)

^c INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

^d ECOLE NORMALE SUPÉRIEURE   (France)

Author keywords

Boron; Diamond like carbon; EELS; Electrical properties; Femtosecond; Nanosecond; Pulsed laser deposition

Indexed keywords

ABLATION; BORON; CARBON FILMS; DIAMONDS; ELECTRIC PROPERTIES; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; ENERGY DISSIPATION; FIELD EMISSION MICROSCOPES; GRAPHITE; HARDENING; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; LASER ABLATION; PULSED LASER DEPOSITION; PULSED LASERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DOPING; TEMPERATURE; ULTRAFAST LASERS;

DIAMOND LIKE CARBON; ELECTRICAL MEASUREMENT; FEMTOSECOND PULSED LASER; FEMTOSECONDS; LOW TEMPERATURE THERMOMETRY; NANOSECOND; NANOSECOND PULSED LASER; TEMPERATURE COEFFICIENT OF RESISTANCE;

DIAMOND LIKE CARBON FILMS;

EID: 70449467703     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.111     Document Type: Article

References (40)

1. Donnet C., and Erdemir A. Tribology of diamond-like carbon films (2008), Springer
2. Robertson J. Mat. Sci. Eng. 37 (2002) 129
3. Garrelie F., Benchikh N., Donnet C., Fillit R.Y., Rouzaud J.N., Laval J.Y., and Pailleret A. Appl. Phys., A 90 (2008) 211
4. Maalouf R., Chebib H., Saikali Y., Vittori O., Sigaud M., Garrelie F., Donnet C., and Jaffrezic-Renault N. Talanta 72 (2007) 310
5. Ronning C., Griesmeier U., Gross M., Hofsäss H.C., Downing R.G., and Lamaze G.P. Diam. Relat. Mater. 4 (1995) 666
6. Kautek W., Pentzien S., Conradi A., Krüger J., and Brzezinka K.W. Appl. Surf. Sci. 106 (1996) 158
7. Chhowalla M., Yin Y., Amaratunga G.A., McKenzie D.R., and Frauenheim T. Appl. Phys. Lett. 69 (1996) 2344
8. Kleinsorge B., Ilie A., Chnowalla M., Fukarek W., Milne W.I., and Robertson J. Diam. Relat. Mater. 7 (1998) 472
9. Cheng H.F., Chuang F.Y., Tsai C.H., Wang W.C., Huang C.M., and Lin I.N. Appl. Surf. Sci. 142 (1999) 504
10. Zhang D., Davalle D.M., O'Brien W.L., and McIlroy D.N. Surf. Sci. 461 (2000) 16
11. Ma Z.Q., and Liu B.X. Sol. Energy Mater. Cells 69 (2001) 339
12. Suda Y., Suganuma Y., Sakai Y., Suzuki K., Tsujino J., and Homma N. Appl. Surf. Sci. 197-198 (2002) 603
13. Tian X., Rusop M., Hayashi Y., Soga T., Jimbo T., and Umeno M. Jpn. J. Appl. Phys. 41 (2002) L970
14. Tian X.M., Rusop M., Hayashi Y., Soga T., Jimbo T., and Umeno M. Sol. Energy Mater. Sol. Cells 77 (2003) 105
15. Podder J., Rusop M., Soga T., and Jimbo T. Diam. Relat. Mater. 14 (2005) 1799
16. Vishwakarma P.N., and Subramanyam S.V. J. Appl. Phys. 100 (2006) 113702
17. Tan M., Zhu J., Han J., Han X., Niu L., and Chen W. Scr. Mater. 57 (2007) 141
18. Tan M., Zhu J., Han J., Gao W., Niu L., and Lu J. Diam. Relat. Mater. 16 (2007) 1739
19. Sikora A., Berkesse A., Bourgeois O., Garden J.L., Guerret-Piécourt C., Loir A.S., Garrelie F., and Donnet C. Appl. Phys., A 94 (2009) 105
20. Sikora A., Berkesse A., Garden J.L., Guerret-Piecourt C., Rouzaud J.N., Loir A.S., Garrelie F., and Donnet C. Solid State Science 11 (2009) 1738
21. Bourgeois O., André E., Macovei C., and Chaussy J. Rev. Sci. Instrum. 77 (2006) 126108
22. Rethfeld B., Sokolowski-Tinten K., von der Linde D., and Anisimov S.I. Appl. Phys., A 79 (2004) 767
23. Zhigilei L.V. Appl. Phys., A 76 (2003) 339
24. Miotello A., and Kelly R. Appl. Phys., A 69 (1999) 67
25. Tokarev V.N., and Kaplan A.F.H. Lasers Eng. 7 (1998) 295
26. Teghil R., D'Alessio L., Santagata A., Zaccagnino M., Ferro D., and Sordelet D.J. Appl. Surf. Sci. 210 (2003) 307-317
27. Amoruso S., Ausanio G., Bruzzese R., Gragnaniello L., Lanotte L., Vitiello M., and Wang X. Appl. Surf. Sci. 252 13 (2006) 4863
28. Perriere J., Millon E., Seiler W., Boulmer-Leborgne C., Craciun V., Albert O., Loulergue J.C., and Etchepare J. J. Appl. Phys. 91 2 (2002) 690
29. Albert O., Roger S., Glinec Y., Loulergue J.C., Etchepare J., Boulmer-Leborgne C., Perriere J., and Millon E. Appl. Phys. A Mater. Sci. Process. 76 (2003) 319
30. Eliezer S., Eliaz N., Grossman E., Fisher D., Gouzman I., Henis Z., Pecker S., Horovitz Y., Fraenkel M., Maman S., and Lereah Y. Phys. Rev., B 69 (2004) 144119
31. Amoruso S., Bruzzese R., Spinelli N., Velotta R., Vitiello M., Wang X., Ausanio G., Iannotti V., and Lanotte L. Appl. Phys. Lett. 84 (2004) 4502
32. Amoruso S., Ausanio G., Bruzzese R., Vitiello M., and Wang X. Phys. Rev. B71 (2004) 33406
33. Amoruso S., Ausanio G., de Lisio C., Iannotti V., Vitiello M., Wang X., and Lanotte L. Appl. Surf. Sci. 247 (2005) 71
34. Katsuno T., Godet C., Orlianges J.C., Loir A.S., Garrelie F., and Catherinot A. Appl. Phys. A81 (2005) 471
35. Schmid H.K. Microsc. Microanal. Microstruct. 6 (1995) 99-111
36. Hoffmann K., Gruehn R., Albert B., and Anorg Z. Allg. Chem. 628 (2002) 2691-2696
37. N. Sbai-Benchikh, PhD Thesis, University Saint-Etienne, France (2005).
38. Silva S.R.P. Diam. Relat. Mater. 12 (2003) 151-158
39. A. Gambirasio, M. Bernasconi, Phys. Rev. B 60 (1999) 12007.
40. Bourgeois O., Skipetrov S., Ong F., and Chaussy J. Phys. Rev. Lett. 94 (2005) 057007