Pulsed laser deposition, in-situ process modeling and feedback control for multi-layer deposition

Surface and Coatings Technology

Volumn 99, Issue 1-2, 1998, Pages 14-19

  Laube, S J P ^a   Voevodin, A A ^b  

^a Building 653   (United States)

^b Materials Directorate/AFRL   (United States)

Author keywords

DLC thin films; Gradient materials; Metal carbide DLC; Multilayer coatings; Process recipes; Pulsed laser deposition

Indexed keywords

EID: 0040733822     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00109-6     Document Type: Article

References (11)

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