Vertically aligned CNT growth on a microfabricated silicon heater with integrated temperature control-determination of the activation energy from a continuous thermal gradient

Journal of Micromechanics and Microengineering

Volumn 21, Issue 1, 2011, Pages

  Engstrøm, Daniel S ^a   Rupesinghe, Nalin L ^b   Teo, Kenneth B K ^b   Milne, William I ^c   Bøgild, Peter ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b AIXTRON Nanoinstruments Ltd   (United Kingdom)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVITY VARIATION; FEM SIMULATIONS; FOUR POINT PROBE; MICRO RAMAN SPECTROSCOPY; MICRO-HEATERS; MICROFABRICATED; MICROHEATER; RATE VARIATION; TEMPERATURE GRADIENT; VERTICALLY ALIGNED; VERTICALLY ALIGNED CARBON NANOTUBE;

CARBON NANOTUBES; FINITE ELEMENT METHOD; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; RAMAN SPECTROSCOPY; THERMAL GRADIENTS; THERMOANALYSIS;

ACTIVATION ENERGY;

EID: 78651517310     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/1/015004     Document Type: Article

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