Fabrication of polymer micro/nano-hybrid lens array by microstructured anodic aluminum oxide (AAO) mold

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 857-860

  Lee, Bong Kee ^a   Cha, Kyung Je ^a   Kwon, Tai Hun ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Hot embossing; Micro nano hybrid lens array; Microstructured anodic aluminum oxide (AAO) mold; Multiscale structures

Indexed keywords

ALUMINUM SUBSTRATES; ANTIREFLECTIVE; ELECTROPOLISHED; FABRICATION METHODS; HOT EMBOSSING; HOT EMBOSSING PROCESS; MICRO-LENS ARRAYS; MICRO-OPTICAL ELEMENTS; MICRO/NANO-HYBRID LENS ARRAY; MICROSTRUCTURED ANODIC ALUMINUM OXIDE (AAO) MOLD; MULTI-SCALE; MULTISCALE STRUCTURES; NANOLENS;

ALUMINUM; ELECTROCHEMICAL OXIDATION; FABRICATION; MICROLENSES; MICROSTRUCTURE; MOLDS; OPTICAL INSTRUMENT LENSES; OXIDES; SHEET MOLDING COMPOUNDS;

ALUMINA;

EID: 67349182465     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.11.066     Document Type: Article

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