Refractive micro lens array made of dichromate gelatin with gray-tone photolithography

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 729-735

  Yao, J ^a   Cui, Z ^a   Gao, F ^a   Zhang, Y ^a   Guo, Y ^a   Du, C ^a   Zeng, H ^a   Qiu, C ^a  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Dichromate gelatin; Enzyme; Gray tone photolithography; Micro optics element; Refractive microlens

Indexed keywords

COMPUTER PROGRAM LISTINGS; ENZYMES; FABRICATION; MASKS; PHOTORESISTS; SUBSTRATES; ULTRAVIOLET RADIATION;

DICHROMATE GELATIN (DCG); REFRACTIVE MICRO LENS ARRAYS;

MICROLENSES;

EID: 0035450656     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00555-X     Document Type: Article

References (7)