Friction Modeling in Linear Chemical-Mechanical Planarization

IEEE Control Systems

Volumn 28, Issue 5, 2008, Pages 59-78

  Yi, Jingang ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749111098     PISSN: 1066033X     EISSN: None     Source Type: Journal    
DOI: 10.1109/MCS.2008.927333     Document Type: Article

References (27)

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