Correlation between growth kinetics and nanoscale resistive switching properties of SrTiO3 thin films

Journal of Applied Physics

Volumn 108, Issue 12, 2010, Pages

  Muenstermann, Ruth ^a   Menke, Tobias ^a   Dittmann, Regina ^a   Mi, Shaobo ^a   Jia, Chun Lin ^a   Park, Daesung ^b   Mayer, Joachim ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL PROPERTY; GROWTH CONDITIONS; HIGH CONCENTRATION; ISLAND GROWTH MODE; LAYER-BY-LAYER GROWTH; METAL-TO-INSULATOR TRANSITIONS; NANO SCALE; RESISTIVE SWITCHING; SRTIO; SWITCHING BEHAVIORS; TIP-INDUCED;

ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; DEFECTS; DEPOSITION; ELECTRIC PROPERTIES; GROWTH KINETICS; METAL INSULATOR TRANSITION; NANOSTRUCTURED MATERIALS; OXYGEN; OXYGEN VACANCIES; PULSED LASER DEPOSITION; SINGLE CRYSTALS; STOICHIOMETRY; STRONTIUM ALLOYS; SWITCHING; SWITCHING SYSTEMS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VACANCIES; VAPOR DEPOSITION;

CONDUCTIVE FILMS;

EID: 78650856203     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3520674     Document Type: Article

References (39)

1. J. Mannhart and D. G. Schlom, http://dx.doi.org/10.1038/430620a (2004).
2. J. Son, P. Moetakef, B. Jalan, O. Bierwagen, N. J. Wright, R. Engel-Herbert, and S. Stemmer, Nature Mater. 1476-1122 9, 482 (2010). 10.1038/nmat2750
3. E. Bousquet, M. Dawber, N. Stucki, C. Lichtensteiger, P. Hermet, S. Gariglio, J. M. Triscone, and P. Ghosez, Nature (London) 0028-0836 452, 732 (2008). 10.1038/nature06817 (Pubitemid 351522765)
4. A. Ohtomo and H. Y. Hwang, Nature (London) 0028-0836 427, 423 (2004). 10.1038/nature02308 (Pubitemid 38168490)
5. L. W. Chang, M. Alexe, J. F. Scott, and J. M. Gregg, Adv. Mater. 0935-9648 21, 4911 (2009). 10.1002/adma.200901756
6. S. V. Kalinin, B. J. Rodriguez, A. Y. Borisevich, A. P. Baddorf, N. Balke, H. J. Chang, L. Q. Chen, S. Choudhury, S. Jesse, P. Maksymovych, M. P. Nikiforov, and S. J. Pennycook, Adv. Mater. 0935-9648 22, 314 (2010). 10.1002/adma.200900813
7. K. Szot, W. Speier, G. Bihlmayer, and R. Waser, Nature Mater. 1476-1122 5, 312 (2006). 10.1038/nmat1614
8. R. Waser, R. Dittmann, G. Staikov, and K. Szot, Adv. Mater. 0935-9648 21, 2632 (2009). 10.1002/adma.200900375
9. D. B. Strukov, G. S. Snider, D. R. Stewart, and R. S. Williams, Nature (London) 0028-0836 453, 80 (2008). 10.1038/nature06932 (Pubitemid 351630336)
10. K. Shibuya, R. Dittmann, S. Mi, and R. Waser, Adv. Mater. 0935-9648 22, 411 (2010). 10.1002/adma.200901493
11. Crystec, http://www.crystec.de/daten/srtio3.pdf
12. K. Szot, R. Dittmann, W. Speier, and R. Waser, Phys. Status Solidi (RRL) 1862-6254 1, R86 (2007). 10.1002/pssr.200701003 (Pubitemid 351175977)
13. W. Frammelsberger, G. Benstetter, J. Kiely, and R. Stamp, Appl. Surf. Sci. 0169-4332 253, 3615 (2007). 10.1016/j.apsusc.2006.07.070 (Pubitemid 46123705)
14. J. Fleig and J. Maier, Solid State Ionics 86-8, 1351 (1996). 10.1016/0167-2738(96)00316-5 (Pubitemid 126357730)
15. T. Ohnishi, M. Lippmaa, T. Yamamoto, S. Meguro, and H. Koinuma, Appl. Phys. Lett. 0003-6951 87, 241919 (2005). 10.1063/1.2146069 (Pubitemid 41780823)
16. T. Ohnishi, K. Shibuya, T. Yamamoto, and M. Lippmaa, J. Appl. Phys. 0021-8979 103, 103703 (2008). 10.1063/1.2921972 (Pubitemid 351776480)
17. T. Suzuki, Y. Nishi, and M. Fujimoto, Philos. Mag. A 0141-8610 80, 621 (2000). 10.1080/01418610008212072
18. C. M. Brooks, L. F. Kourkoutis, T. Heeg, J. Schubert, D. A. Muller, and D. G. Schlom, Appl. Phys. Lett. 0003-6951 94, 162905 (2009). 10.1063/1.3117365
19. R. Moos and K. H. Haerdtl, J. Am. Ceram. Soc. 0002-7820 80, 2549 (1997). 10.1111/j.1151-2916.1997.tb03157.x
20. T. Menke, P. Meuffels, R. Dittmann, K. Szot, and R. Waser, J. Appl. Phys. 0021-8979 105, 066104 (2009). 10.1063/1.3100209
21. J. De Souza, J. Fleig, and J. Maier, J. Appl. Phys. 0021-8979 97, 053502 (2005). 10.1063/1.1853495 (Pubitemid 40818228)
22. C. L. Jia, A. Thust, and K. Urban, Phys. Rev. Lett. 0031-9007 95, 225506 (2005). 10.1103/PhysRevLett.95.225506 (Pubitemid 41776987)
23. R. Münstermann, Ph.D. thesis, RWTH Aachen University, 2006.
24. A. Stashans and L. Villamagua, J. Phys. Chem. Solids 0022-3697 70, 417 (2009). 10.1016/j.jpcs.2008.11.020
25. Y. Zhu, Acta Mater. 1359-6454 53, 1277 (2005). 10.1016/j.actamat.2004.11. 020 (Pubitemid 40200569)
26. J. Shin, S. V. Kalinin, A. Y. Borisevich, E. W. Plummer, and A. P. Baddorf, Appl. Phys. Lett. 0003-6951 91, 202901 (2007). 10.1063/1.2790477 (Pubitemid 350128924)
27. Y. L. Qin, C. L. Jia, K. Urban, J. H. Hao, and X. X. Xi, J. Mater. Res. 0884-2914 17, 3117 (2002). 10.1557/JMR.2002.0451
28. C. J. Lu, L. A. Bendersky, K. Chang, and I. Takcuchi, Symposium on Structure-Property Relationships of Oxide Surfaces and Interfaces II held at the 2002 MRS Fall Meeting (Boston, MA, 2003), pp. 37-42.
29. F. Baudenbacher, Oberflächenmorphologie und Wachstumsmodus epitaktischer YBa2Cu3O7-Filme (Shaker Verlag, Aachen, 1997).
30. J. Q. He, E. Vasco, R. Dittmann, and R. H. Wang, Phys. Rev. B 0556-2805 73, 125413 (2006). 10.1103/PhysRevB.73.125413 (Pubitemid 43429364)
31. G. Rijnders, Ph.D. thesis, Universiteit Twente, 2001.
32. J. Maier and R. Merkle, Angew. Chem., Int. Ed. 1433-7851 47, 21 (2008).
33. C. L. Jia, L. Houben, and K. Urban, Philos. Mag. Lett. 0950-0839 86, 683 (2006). 10.1080/09500830600965087 (Pubitemid 44664091)
34. L. Pellegrino, E. Bellingeri, A. S. Siri, and D. Marre, Appl. Phys. Lett. 0003-6951 87, 064102 (2005). 10.1063/1.2009054 (Pubitemid 41202733)
35. R. Muenstermann, R. Dittmann, K. Szot, S. Mi, C. -L. Jia, P. Meuffels, and R. Waser, Appl. Phys. Lett. 0003-6951 93, 023110 (2008). 10.1063/1.2959074
36. J. J. Yang, M. D. Pickett, X. Li, D. A. A. Ohlberg, D. R. Stewart, and R. S. Williams, Nat. Nanotechnol. 3, 429 (2008). 10.1038/nnano.2008.160
37. Y. B. Nian, J. Strozier, N. J. Wu, X. Chen, and A. Ignatiev, Phys. Rev. Lett. 0031-9007 98, 146403 (2007). 10.1103/PhysRevLett.98.146403 (Pubitemid 46557459)
38. M. J. Rozenberg, M. J. Sanchez, R. Weht, C. Acha, F. Gomez-Marlasca, and P. Levy, Phys. Rev. B 0556-2805 81, 115101 (2010). 10.1103/PhysRevB.81.115101
39. K. Szot, W. Speier, R. Carius, U. Zastrow, and W. Beyer, Phys. Rev. Lett. 0031-9007 88, 075508 (2002). 10.1103/PhysRevLett.88.075508