CMOS-integrated sensor chip for in-plane and out-of-plane shear stress

Procedia Engineering

Volumn 5, Issue , 2010, Pages 1364-1367

  Gieschke, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

CMOS MEMS; Out of plane stress sensor; Piezo FET; Piezoresistive sensor; Stress mapping

Indexed keywords

AMPLIFIERS (ELECTRONIC); CMOS INTEGRATED CIRCUITS; DATA HANDLING; EPOXY RESINS; FIELD EFFECT TRANSISTORS; METALS; MOS DEVICES; OXIDE SEMICONDUCTORS; SHEAR STRESS; SIGNAL PROCESSING; STRESS MEASUREMENT;

CMOS-MEMS; COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES; ENCAPSULATION PROCESS; INSTRUMENTATION AMPLIFIER; OUT-OF-PLANE SHEAR; OUT-OF-PLANE STRESS; PIEZO-FET; PIEZO-RESISTIVE SENSORS;

STRESSES;

EID: 78650604184     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.368     Document Type: Conference Paper

References (9)

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