SIMS study on the initial oxidation process of AlN ceramic substrate in the air

Applied Surface Science

Volumn 148, Issue 1, 1999, Pages 73-78

  Yue, Ruifeng ^a   Wang, Yan ^b   Wang, Youxiang ^c   Chen, Chunhua ^c  

^a TSINGHUA UNIVERSITY   (China)

^b XI'AN UNIVERSITY OF TECHNOLOGY   (China)

^c INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CERAMIC MATERIALS; HIGH TEMPERATURE EFFECTS; NITRIDES; OXIDATION; REACTION KINETICS; SECONDARY ION MASS SPECTROMETRY; SUBSTRATES; THERMODYNAMICS; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE; CHEMICAL THERMODYNAMICS;

ALUMINUM COMPOUNDS;

EID: 0032636321     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00128-2     Document Type: Article

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