LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Journal of Electron Spectroscopy and Related Phenomena

Volumn 134, Issue 2-3, 2004, Pages 173-181

  Agouram, Säd ^a   Bodart, Franz ^a   Terwagne, Guy ^a  

^a UNIVERSITY OF NAMUR   (Belgium)

Author keywords

Chromium oxynitride; LEEIXS; XPS

Indexed keywords

ATMOSPHERIC HUMIDITY; CARBON; CHEMICAL BONDS; CHROMIUM COMPOUNDS; COMPOSITION; CONCENTRATION (PROCESS); CORROSION RESISTANCE; ELECTRIC ARCS; MAGNETRON SPUTTERING; STOICHIOMETRY; SUBSTRATES; THIN FILMS; X RAY SPECTROSCOPY;

LOW ENERGY ELECTRON INDUCED X-RAY SPECTROSCOPY (LEEIXS); RESONANT NUCLEAR REACTION ANALYSIS (RNRA);

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0842269183     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2003.10.004     Document Type: Article

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