SIMS investigation of nitride coatings

Vacuum

Volumn 78, Issue 2-4, 2005, Pages 545-550

  Anischik, V M ^a   Uglov, V V ^a   Zlotski, S V ^a   Konarski, P ^b   Cwil, M ^b   Ukhov, V A ^c  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

^b TELE AND RADIO RESEARCH INSTITUTE   (Poland)

^c Belmicrosystems   (Belarus)

Author keywords

CAVD gradient Ti Cr N coatings; Microstructure; SIMS investigations

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CORROSION RESISTANCE; DEPOSITION; GRAIN SIZE AND SHAPE; ION BOMBARDMENT; MICROSTRUCTURE; NITRIDES; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; TRANSMISSION ELECTRON MICROSCOPY; VACUUM; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS;

CATHODIC ARC VAPOR DEPOSITION (CAVD); COATING THICKNESS; NITRIDE COATINGS; TI-CR-N COATINGS;

PROTECTIVE COATINGS;

EID: 18444396282     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.083     Document Type: Conference Paper

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