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Journal of the Korean Physical Society

Volumn 57, Issue 6, 2010, Pages 1472-1476

Preparation of zinc-tin-oxide thin film by using an atomic layer deposition methodology

(1) Choi, Woon Seop a

a Hoseo University (South Korea)

Author keywords

ALD; Anneal; Thermal; Zinc tin oxide

Indexed keywords

EID: 78650395488 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: 10.3938/jkps.57.1472 Document Type: Article

Times cited : (18)

References (18)

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