Theoretical investigation of the spectrum and conversion efficiency of short wavelength extreme-ultraviolet light sources based on terbium plasmas

Applied Physics Letters

Volumn 97, Issue 23, 2010, Pages

  Sasaki, Akira ^a   Nishihara, Katsunobu ^b   Sunahara, Atsushi ^c   Furukawa, Hiroyuki ^c   Nishikawa, Takeshi ^d   Koike, Fumihiro ^e  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c INSTITUTE FOR LASER TECHNOLOGY   (Japan)

^d OKAYAMA UNIVERSITY   (Japan)

^e KITASATO UNIVERSITY SCHOOL OF MEDICINE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; ATOMIC DATA; EFFICIENT EMISSION; EMISSION SPECTRUMS; EXTREME ULTRAVIOLETS; ISOTHERMAL EXPANSION; ORDER OF MAGNITUDE; SHORT WAVELENGTHS; THEORETICAL INVESTIGATIONS;

CONVERSION EFFICIENCY; EMISSION SPECTROSCOPY; LIGHT SOURCES; PLASMAS; PUMPING (LASER); TERBIUM; TIN; ULTRAVIOLET RADIATION;

ATOMIC SPECTROSCOPY;

EID: 78650344197     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3524494     Document Type: Article

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