Post-CMOS wafer level growth of carbon nanotubes for low-cost microsensors - A proof of concept

Nanotechnology

Volumn 21, Issue 48, 2010, Pages

  Santra, Sumita ^a   Ali, Syed Z ^d   Guha, Prasanta K ^a,b   Zhong, Guofang ^a   Robertson, John ^a   Covington, James A ^c   Milne, William I ^a   Gardner, Julian W ^c   Udrea, Florin ^a,d  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b INDIAN INSTITUTE OF TECHNOLOGY   (India)

^c UNIVERSITY OF WARWICK   (United Kingdom)

^d AMS AG   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CNT SENSORS; ELEVATED TEMPERATURE; GROWTH TECHNIQUES; MASS PRODUCTION; MICRO-HEATERS; NOVEL TECHNIQUES; ON-WAFER; OPTICAL CHARACTERIZATION; POST-CMOS; PROOF OF CONCEPT; WAFER LEVEL; WAFER-LEVEL INTEGRATION;

HEATING EQUIPMENT; SENSORS; TUNGSTEN;

CARBON NANOTUBES;

EID: 78650139550     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/48/485301     Document Type: Article

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