MEMS resonant load cells for micro-mechanical test frames: Feasibility study and optimal design

Journal of Micromechanics and Microengineering

Volumn 20, Issue 12, 2010, Pages

  Torrents, A ^a   Azgin, K ^a   Godfrey, S W ^a   Topalli, E S ^b   Akin, T ^b   Valdevit, L ^a  

^a University of California at Irvine   (United States)

^b MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODELING; C++ CODES; DEVICE GEOMETRIES; DISPLACEMENT RESOLUTION; DOUBLE-ENDED TUNING FORKS; EXPERIMENTAL VERIFICATION; FEASIBILITY STUDIES; FINITE ELEMENTS ANALYSIS; FORCE RESOLUTION; IN-VACUUM; LOAD CELLS; MICRO-MECHANICAL; OPERATING VOLTAGE; OPTIMAL DESIGN; OPTIMAL DEVICES; PARTICLE SWARM OPTIMIZATION ALGORITHM; RESONANT LOAD; SEM; SILICON ON GLASS; VACUUM LEVEL;

DESIGN; MANUFACTURE; OPTICAL COMMUNICATION; OPTIMAL SYSTEMS; PARTICLE SWARM OPTIMIZATION (PSO); VACUUM;

ELECTROMECHANICAL DEVICES;

EID: 78649733005     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/12/125004     Document Type: Article

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