Simulation, fabrication and characterization of a 3D piezoresistive force sensor

Sensors and Actuators, A: Physical

Volumn 147, Issue 2, 2008, Pages 430-435

  Tibrewala, A ^a   Phataralaoha, A ^a   Buttgenbach S ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Diffused silicon piezoresistors; Force sensor

Indexed keywords

MANGANESE ALLOYS; OPTICAL DESIGN; SENSORS; STIFFNESS;

DIE SIZE; DIFFUSED SILICON PIEZORESISTORS; FORCE SENSOR; FORCE SENSORS; FULL SCALE; MEASUREMENT RESULTS; MICRO PROBES; PIEZO-RESISTORS; PIEZORESISTIVE; Z DIRECTIONS;

MANGANESE COMPOUNDS;

EID: 49849089226     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.05.020     Document Type: Article

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