Parylene to silicon adhesion enhancement

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1027-1030

  Huang, Ray ^a   Tai, Y C ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Adhesion; CVD thin film; Packaging; Parylene C

Indexed keywords

ADHESION ENHANCEMENT; ADHESION PROMOTION; BENCH TESTING; BIOCOMPATIBLE COATINGS; CVD THIN-FILM; EXPERIMENTAL DATA; NEURAL INTERFACES; PARYLENE C; PARYLENES; PEELING TEST; SILICON PROBE; SILICON SURFACES; THERMAL TREATMENT;

ACTUATORS; ADHESION; CHEMICAL VAPOR DEPOSITION; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; THIN FILM DEVICES;

SOLID-STATE SENSORS;

EID: 71449083295     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285963     Document Type: Conference Paper

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