Theoretical and experimental study of annular-plate self-sealing structures

Journal of Microelectromechanical Systems

Volumn 17, Issue 1, 2008, Pages 185-192

  Wang, Zhuo ^a   Xu, Yong ^a  

^a Wayne State University   (United States)

Author keywords

Annular plate; Energy method; Self sealing; Stiction

Indexed keywords

DESIGN; DRYING; MICROSTRUCTURE; NUMERICAL ANALYSIS; SELF ASSEMBLY; STICTION;

ANNULAR-PLATE; ENERGY METHOD; SELF-SEALING;

MEMS;

EID: 40449138799     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.911371     Document Type: Article

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